- 伊瑪ema
- 必測Venture
- 美國KM
- 西特SETRA產品
- 日本能研NOHKEN/
- 英國GEMS捷邁
- joslyn clark強士林克...
- 日本東和制電TOWA料位開關
- Alpha阿爾法
- 安德森-耐格anderson-n...
- ZSON仲圣產品
-
Controller senso...
- MEAS精量電子
-
SENEX森納士壓力變送器
- 以色列索利得solidat
- 西門子siemens
-
日本sentec勝鐵克
- 日本橫河YoKogawa
- 日本能研NOHKEN
-
美國斯盧森SOLUTION產品
-
FLEXIM夾管式流量計
- 羅斯蒙特壓力變送器
-
庫存查詢
-
沃克walker
-
美國Kistler-Morse(...
|
DESCRIPTION |
|
The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor industries using very small sensor (VSS) technology. Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-700 Series provides a continuous transmitter with a very high degree of precision. The SL-700 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.
FEATURES APPLICATIONS
|
? 316 LSS machine body sensor |
? Semiconductor industries |
|
? Sensor material finish 10μin RA electropolished |
|
|
? Miniature sensor size reduces liquid volume displacement ? Works with the following chemicals independent |
|
|
of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA ? High pressure vessel application up to 250 |
|
|
PSIG (1724 Kpa) (consult factory for higher pressure applications) |
|
|
? Accuracy of continuous level transmitter ±0.01 in (0.25 mm) or better ? Continuous transmitter output, 4-20 mA, 1-10 V, |
|
|
RS-232, remote unit with digital display, two alarm |
|
美國精量電子MEAS超聲波液位計SL-700
|
Parameter |
Typical Value |
|
Repeatability |
±0.005 in (0.127 mm) typical |
|
Input Power |
VDC, 115 VAC/230VAC, 50/60 Hz (optional) |
|
Output |
Continuous 4-20 mA. 0-5 V or 0-10 V, RS 232 PC compatible, bidirectional communication, two alarm |
|
Housing |
NEMA 1; NEMA-4X (stainless steel) optional |
|
Range |
to 10 in (25.4 to 254 mm) (consult factory for longer range |
|
Parameter |
Typical Value |
|
Mounting |
?’ M VCR, ?” F VCR |
|
Sensor Material |
LSS (standard) |
|
Operating Pressure |
Up to 250 PSIG (1724 Kpa) |
|
Temperature |
Sensor: -20 to 200 °F (-29 to 93 °C) Electronics: -20 to 170 °F (-29 to 77 °C) |
|
|
|
MECHANICAL DIMENSIONS |
|
in inches [mm] |
|
|
美國精量電子MEAS超聲波液位計SL-700
Figure 1: SL-700 series elements electronic module
